Ion Implantation: Basics to Device Fabrication (The Springer International Series in Engineering and Computer Science)

Ion Implantation: Basics to Device Fabrication (The Springer International Series in Engineering and Computer Science)

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  • Binding: Hardcover (393 Pages)
  • Publisher: Springer (December 31, 1994)
  • Author: Emanuele Rimini
  • ISBN-10: 0792395204
  • ISBN-13: 9780792395201