Fundamental Principles of Optical Lithography: The Science of Microfabrication

Fundamental Principles of Optical Lithography: The Science of Microfabrication

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  • Binding: Paperback (534 Pages)
  • Publisher: JW (December 17, 2007)
  • Author: Chris Mack
  • ISBN-10: 0470727306
  • ISBN-13: 9780470727300